Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures
Author:
Funder
Horizon 2020
Publisher
American Physical Society (APS)
Subject
Physics and Astronomy (miscellaneous),General Materials Science
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevMaterials.4.013601/fulltext
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