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Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation

  • Published:2022-09-21 Issue:6 Volume:42 Page:1223-1235
  • ISSN:0272-4324
  • Container-title:Plasma Chemistry and Plasma Processing
  • language:en
  • Short-container-title:Plasma Chem Plasma Process

Author:

Korobeishchikov N. G.,Stishenko P. V.,Nikolaev I. V.,Yakovlev V. V.

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers;Vestnik Moskovskogo Universiteta, Seriya 3: Fizika, Astronomiya;2024-07-09

2. Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers;Moscow University Physics Bulletin;2024-06

3. Features of the Cluster-Ion Treatment of the Surface of a KGd(WO4)2:Nd Single Crystal;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2024-04

4. Features of cluster ion treatment of the surface of KGd(WO<sub>4</sub>)<sub>2</sub>:Nd single crystal;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2024-03-15

5. Effect of gas cluster species on crater formation for fused silica;Journal of Non-Crystalline Solids;2023-11
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