Round Robin: measurement of H implantation distributions in Si by elastic recoil detection-Reference-Cited by-同舟云学术

Round Robin: measurement of H implantation distributions in Si by elastic recoil detection

Published:2004-08 Issue:3-4 Volume:222 Page:547-566
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Boudreault G,Elliman R.G,Grötzschel R,Gujrathi S.C,Jeynes C,Lennard W.N,Rauhala E,Sajavaara T,Timmers H,Wang Y.Q,Weijers T.D.M

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference50 articles.

1. Fundamentals of Surface and Thin Film Analysis;Feldman,1986

2. Handbook of Modern Ion Beam Materials Analysis,1995

3. Forward Recoil Spectrometry – Applications to Hydrogen Determination in Solids;Tirira,1996

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