Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Published:2015 Issue:5 Volume:30 Page:1086-1099
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Kayser Yves¹²³⁴⁵,Hönicke Philipp⁶⁷⁸,Banaś Dariusz⁹¹⁰¹¹¹²,Dousse Jean-Claude¹²³⁴,Hoszowska Joanna¹²³⁴,Jagodziński Paweł¹¹³¹⁴¹²,Kubala-Kukuś Aldona⁹¹⁰¹¹¹²,Nowak Stanisław H.¹²³⁴,Pajek Marek⁹¹⁰¹¹¹²

Affiliation:

1. Department of Physics

2. University of Fribourg

3. 1700 Fribourg

4. Switzerland

5. Paul Scherrer Institut

6. Physikalisch-Technische Bundesanstalt

7. 10587 Berlin

8. Germany

9. Institute of Physics

10. Jan Kochanowski University

11. 25-406 Kielce

12. Poland

13. Kielce University of Technology

14. 25-314 Kielce

Abstract

Grazing XRF measurements allow for a non-destructive investigation of the depth distribution of ion implantations.

Funder

Swiss National Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/JA/C4JA00461B

Reference85 articles.

1. History of industrial and commercial ion implantation 1906–1978

2. Comprehensive analytical expression for dose dependent ion-implanted impurity concentration profiles

3. H. Wu , N.Conrad, W.Luo and P. D.Ye, Electron Devices Meeting (IEDM), IEEE International, 2014, pp. 9.3.1–9.3.4

4. New avenues to an old material: controlled nanoscale doping of germanium

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Complementary techniques for the reliable characterisation of tissue samples: A case study on pancreatic tumours analysed by means of X-ray fluorescence analysis and IR spectroscopy;PLOS ONE;2024-09-04

2. Traceable Characterization of Nanomaterials by X-ray Spectrometry Using Calibrated Instrumentation;Nanomaterials;2022-06-30

3. Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces;Nanoscale;2022

4. Low-Angle X-Ray Spectroscopy and Reflectometry Techniques in Interdisciplinary Applications;Acta Physica Polonica A;2021-03

5. Towards a calibration of laboratory setups for grazing incidence and total-reflection X-ray fluorescence analysis;Spectrochimica Acta Part B: Atomic Spectroscopy;2020-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3