History of industrial and commercial ion implantation 1906–1978-Reference-Cited by-同舟云学术

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History of industrial and commercial ion implantation 1906–1978

Published:2000-07 Issue:4 Volume:18 Page:1746-1750
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Yarling C. B.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582417

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