Author:
Wang L.,Zhao Y.E.,Chen Dihu,Wong S.P.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
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1. Effects of Thermal Annealing on the Formation of Buried β-SiC by Ion Implantation;Journal of Electronic Materials;2011-06-30
2. Formation of SiC using low energy CO2 ion implantation in silicon;Applied Surface Science;2008-12
3. Influence of SHI irradiation on the formation of buried SiC;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-07
4. Synthesis and characterization of embedded SiC phase;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-01
5. Synthesis of buried SiC using an energetic ion beam;Journal of Physics D: Applied Physics;2006-09-01