Deposition of titanium nitride on Si(100) wafers using plasma focus
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference43 articles.
1. Tribological behaviour and mechanical properties of physical-vapour-deposited hard coatings: TiNx, ZrNx, TiCx, TiCx/i-C
2. Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium
3. Investigation of reactively sputtered TiN films for diffusion barriers
4. Morphology-dependent oxidation behavior of reactively sputtered titanium–nitride films
5. Optical Properties of CVD-Coated TiN, ZrN and HfN
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