Implant isolation of plasma-assisted MBE grown GaInAsN for opto-telecommunication applications
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Characterization of defects in doped InGaAsN grown by molecular-beam epitaxy
2. Thermodynamic analysis of the MBE growth of GaInAsN
3. G. Li, W. Han, Y. Luo, D. Han, C. Ji, in: Proc. 4th Int. Conf. Sol. Stat. Int. Cir. Technol. 1995, p. 399.
4. Formation of device isolation in GaAs with polyenergetic ion implantation
5. Ion implantation for isolation of III-V semiconductors
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