Application of μRBS/ERDA system in microstructured devices-Reference-Cited by-同舟云学术

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Application of μRBS/ERDA system in microstructured devices

Published:2021-04 Issue: Volume:492 Page:23-28
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Saito M.,Hayashi Y.,Kosaka S.,Yahiro J.,Miwa M.,Toyama S.,Matsuyama S.^ORCID

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Enhancement of SiN-induced compressive and tensile strains in Si free-standing microstructures by modulation of SiN network structures;Sadoh;Thin Solid Films,2012

2. Measurement of hydrogen content in diamond by ERDA;Konishi;Nucl. Instr. Meth. B,1996

3. Raman scattering and hydrogen-content analysis of amorphous hydrogenated carbon films irradiated with 200-keV C+ ions;Farrow;Phys. Rev. B,1990

4. Characterization of SiOxNyHZ and SiNyHZ using RBS, ERDA and NRA;Wielunski;Nucl. Instr. Meth. B,1996

5. Progress and application of the Tohoku microbeam system;Matsuyama;Nucl. Instr. Meth. B,2007

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