Characterization of SiOxNyHz and SiNyHz using RBS, ERDA and NRA In memoriam Priv.-Doz. Dr. Rainer P.H. Garten-Reference-Cited by-同舟云学术

Characterization of SiOxNyHz and SiNyHz using RBS, ERDA and NRA In memoriam Priv.-Doz. Dr. Rainer P.H. Garten

Published:1996-04 Issue:1-2 Volume:111 Page:115-125
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Wielunski M.,Bubert H.,Garten R.P.H.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference35 articles.

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