Internal energy evaluation of sputtered molecule under size-selected argon cluster ion bombardment onto soft or hard sample
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Published:2024-08
Issue:
Volume:553
Page:165381
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ISSN:0168-583X
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Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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language:en
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Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Author:
Toku TaiseiORCID,
Moritani KousukeORCID,
Tanaka Yudai,
Inui Norio