Optical study of Si nanocrystals in Si/SiO2 layers by spectroscopic ellipsometry
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
1. Photoluminescence properties of silicon nanocrystals as a function of their size
2. Optical properties of Si+-ion implanted sol–gel derived SiO2 films
3. Depth profiling of Si nanocrystals in Si-implanted SiO2 films by spectroscopic ellipsometry
4. Ellipsometric study of silicon nanocrystal optical constants
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2. Optical and Structural Properties of Si Nanocrystals in SiO2 Films;Nanomaterials;2015-04-22
3. Spectroscopic ellipsometry study of Si nanocrystals embedded in a SiOx matrix: Modeling and optical characterization;Applied Surface Science;2014-11
4. Study of crystallization and phase mixing in SiO 2 /SiO x superlattices through form birefringence measurements;SPIE Proceedings;2008-04-25
5. Localized CO2 Laser Annealing Induced Dehydrogenation/Ablation and Optical Refinement of Silicon-Rich Silicon Dioxide Film with Embedded Si Nanocrystals;Journal of Nanoscience and Nanotechnology;2006-12-01
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