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Spectroscopic ellipsometry study of Si nanocrystals embedded in a SiOx matrix: Modeling and optical characterization

  • Published:2014-11 Issue: Volume:318 Page:256-261
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Ilday Serim,Nogay GizemORCID,Turan Rasit

Funder

Scientific and Technological Research Council of Turkey (TÜBİTAK)

Federal Ministry of Education and Research Council of Germany (BMBF)

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference17 articles.

1. Si Nanocrystals: Fundamentals, Synthesis, and Applications;Pavesi,2010

2. Handbook of Ellipsometry;Tompkins,2005

3. Ellipsometric characterization of SiOx films with embedded Si nanoparticles;Szekeres;Vacuum,2010

4. Correlation between silicon nanocrystalline size effect and spectroscopic ellipsometry responses;En Naciri;Thin Solid Films,2004

5. Dielectric function of Si nanocrystals embedded in SiO2;Gallas;Thin Solid Films,2004

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