Sputtering of silicon at glancing incidence-Reference-Cited by-同舟云学术

Sputtering of silicon at glancing incidence

Published:2013-05 Issue: Volume:303 Page:142-147
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Lindsey S.,Hobler G.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference20 articles.

3. M. Maazouz, FEI Company, Hillsboro, OR, Private Communication.

5. J.F. Ziegler, M.D. Ziegler, J.P. Biersack, SRIM 2008.04. http://www.srim.org.

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