Amorphous pockets in Si: Comparison of coupled molecular dynamics and TEM image contrast simulations with experimental results-Reference-Cited by-同舟云学术

Amorphous pockets in Si: Comparison of coupled molecular dynamics and TEM image contrast simulations with experimental results

Published:2007-02 Issue:1 Volume:255 Page:105-109
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Otto G.,Hobler G.,Palmetshofer L.,Pongratz P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference23 articles.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. Dynamic binary collision simulation of focused ion beam milling of deep trenches;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-07

3. Amorphous pocket model based on the modified heat transport equation and local lattice collapse;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-05

4. Sub-surface retention of Pb atoms in silicon after low-energy ion implantation and electron beam annealing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-04