Sensing and control interface for precise gap control-Reference-Cited by-同舟云学术

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Sensing and control interface for precise gap control

Published:2018-12 Issue: Volume:56 Page:277-286
ISSN:0957-4158
Container-title:Mechatronics
language:en
Short-container-title:Mechatronics

Author:

Andonian Michael,M’Closkey Robert T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference10 articles.

1. Capacitive detection scheme for space accelerometers applications;Josselin;Sens Actuat A,1999

2. A differential capacitance to voltage converter for electrostatic levitation applications;Han;Sens Actuat A,2002

3. Electrostatically levitated spherical 3-axis accelerometer;Toda,2002

4. Electronic interface design for an electrically floating micro-disc;Gindila;J Micromech Microeng,2003

5. Modal parameter tuning of an axisymmetric resonator via mass perturbation;Schwartz;J Microelectromech Syst,2015

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3. Modeling and control of electrostatically levitated MEMS;2021 IEEE Conference on Control Technology and Applications (CCTA);2021-08-09

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