Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Reference8 articles.
1. Atkinson JL. Electrostatic bearing. U.S. Patent 3334949, 1967.
2. Tailored etch profiles for wafer-level frequency tuning of axisymmetric resonators;Behbahani;J Microelectromech Syst,2017
3. Capacitive detection scheme for space accelerometers applications;Josselin;Sens Actuators A,1999
4. Electrostatically levitated spherical 3-axis accelerometer;Toda,2002
5. A differential capacitance to voltage converter for electrostatic levitation applications;Han;Sens Actuators A,2002
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Contactless Suspension of a Silicon Disk;2023 American Control Conference (ACC);2023-05-31
2. An electrostatically suspended contactless platform;Mechatronics;2021-12
3. Modeling and control of electrostatically levitated MEMS;2021 IEEE Conference on Control Technology and Applications (CCTA);2021-08-09