Electronic interface design for an electrically floating micro-disc
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. A differential capacitive low-g microaccelerometer with mg resolution
2. Electrical levitation for micromotors, microgyroscopes and microaccelerometers
3. Experimental study of electric suspension for microbearings
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