A differential capacitive low-g microaccelerometer with mg resolution-Reference-Cited by-同舟云学术

A differential capacitive low-g microaccelerometer with mg resolution

Published:2000-10 Issue:1-2 Volume:86 Page:45-51
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tay Francis E.H,Xu J,Logeeswaran V.J

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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2. A 3-axis force balanced accelerometer using a single proof-mass;Lemkin;Tranducers'97,1997

3. Accelerometer Sensor in Surface Micromachining for Airbag Applications with High Signal/Noise Ratio;Offenberg,1996

4. CMOS interface circuit for a low-voltage micromachined tunneling accelerometer;Yeh;J. Microelectromech. Syst.,1998

5. Sensors Handbook;Soloman,1998

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