The constitution and properties of cubic boron nitride thin films: a comparative study on the influence of bombarding ion energy-Reference-Cited by-同舟云学术

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The constitution and properties of cubic boron nitride thin films: a comparative study on the influence of bombarding ion energy

Published:2003-09 Issue: Volume:174-175 Page:1121-1125
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Sell K.,Ulrich S.,Nold E.,Ye J.,Leiste H.,Stüber M.,Holleck H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference31 articles.

1. Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzle

2. Properties of BN thin films deposited by plasma CVD

3. Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

4. Ion‐assisted pulsed laser deposition of cubic boron nitride films

5. Low energy kinetic threshold in the growth of cubic boron nitride films

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1. Characterization of surface modification mechanisms for boron nitride films under plasma exposure;Surface and Coatings Technology;2019-11

2. Sputtering of pure boron using a magnetron without a radio-frequency supply;Review of Scientific Instruments;2017-04

3. Effects of Nitrogen Partial Pressures During RF Magnetron Sputtering on the Crystal Structure and Growth Rate of c-BN Films;Korean Journal of Metals and Materials;2014-06-05

4. Elastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targets;Journal of Applied Physics;2013-12-07

5. Energy fluxes in a radio-frequency magnetron discharge for the deposition of superhard cubic boron nitride coatings;Journal of Applied Physics;2012-12-15

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