Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply-Reference-Cited by-同舟云学术

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Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Published:1990-08 Issue:1 Volume:189 Page:125-138
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Mineta S.,Kohata M.,Yasunaga N.,Kikuta Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Vacuum Deposition of Thin Films by Means of a CO2 Laser

2. Highly oriented ZnO films grown by laser evaporation

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