Sputtering of pure boron using a magnetron without a radio-frequency supply-Reference-Cited by-同舟云学术

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Sputtering of pure boron using a magnetron without a radio-frequency supply

Published:2017-04 Issue:4 Volume:88 Page:043506
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Oks Efim¹²,Anders André³^ORCID,Nikolaev Alexey¹^ORCID,Yushkov Yury¹²

Affiliation:

1. Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk 634055, Russia

2. Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050, Russia

3. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA

Funder

U.S. Department of Energy (DOE)

Russian Science Foundation (RSF)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4980149

Reference24 articles.

1. Ion implantation boriding of iron and AISI M2 steel using a high-current density, low energy, broad-beam ion source

2. Modified layer formation by means of high current density nitrogen and boron implantation

3. Preparation, properties and applications of boron nitride thin films

4. Energetic deposition of [sup 10]B on high aspect ratio trenches for neutron detectors

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deposition and photoluminescence of zinc gallium oxide thin films with varied stoichiometry made by reactive magnetron co-sputtering;Journal of Alloys and Compounds;2024-03

2. Comparative study of DC and pulse-DC I-V characteristics curves of cylindrical magnetron in open and confined space;AIP Conference Proceedings;2024

3. DEPOSITION OF PURE BORON COATINGS BY MAGNETRON SPUTTERING AND INVESTIGATION OF THEIR PROPERTIES;High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes;2024

4. Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition;Russian Physics Journal;2023-12

5. Investigation of the Properties of Boron Coatings Obtained by Electron-Beam Evaporation of Pure Boron;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

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