Author:
Oh B.H.,Bae J.W.,Kim J.H.,Kim K.J.,Ahn Y.S.,Lee N.-E.,Yeom G.Y.,Yoon S.S.,Chae S.-K.,Ku M.-S.,Lee S.-G.,Cho D.-H.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. International Technology Roadmap for Semiconductors,1999
2. Cold Plasma in Materials Fabrication;Grill,1993
3. Tool Perfluorocompound (PFC) Emission Data Report;Worth,1997
4. Plasma abatement of perfluorocompounds in inductively coupled plasma reactors
5. Proceedings of the Semicon West Seminar: Improving Environmental Performance of Wafer Manufacturing Processes;Allgood,2000
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献