Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. Treatment of polymers for subsequent metallization using intense UV radiation or plasma at atmospheric pressure
2. Plasma-enhanced chemical-vapour-deposition of thin films by corona discharge at atmospheric pressure
3. Diagnoses of inductively coupled SF6 and N2 plasmas at atmospheric pressure
4. Deposition of silicon dioxide films with an atmospheric-pressure plasma jet
5. Etching materials with an atmospheric-pressure plasma jet
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