Author:
Paul K.C.,Hatazawa S.,Takahashi M.,Cliteur G.J.,Sakuta T.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. IEEE Trans;Paul;Plasma Science,1998
2. K.C. Paul, Ph.D. Thesis, Chapter 4–6, Kanazawa University, Japan (1998).
3. Plasma Chem;Mostaghimi;Plasma Process.,1989
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