Deposition of TiN thin films on Si(100) by HCD ion plating
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Structure and properties of TiN coatings
2. Microstructure and Hardness of Hollow Cathode Discharge Ion-Plated Titanium Nitride Film
3. Nanoindentation studies of single‐crystal (001)‐, (011)‐, and (111)‐oriented TiN layers on MgO
4. Mechanical Properties of TiN Whiskers
5. Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering
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