Nanoindentation studies of single‐crystal (001)‐, (011)‐, and (111)‐oriented TiN layers on MgO
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363799
Reference30 articles.
1. Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure
2. Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation
3. Young's modulus of TiN, TiC, ZrN and HfN
4. X-ray elastic constants and residual stress of textured titanium nitride coating
5. Thin film characterization using a mechanical properties microprobe
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