Particle energy and angle distributions in ion beam sputtering-Reference-Cited by-同舟云学术

Particle energy and angle distributions in ion beam sputtering

Published:1997-12 Issue:1-3 Volume:97 Page:90-96
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Franke E.,Neumann H.,Zeuner M.,Frank W.,Bigl F.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference11 articles.

1. Energieverteilungen bei der Festk�rperzerst�ubung durch Ionenbeschu�

2. P.C. Zalm, in: J.J.Cuomo, S.M. Rossnagel, H.R. Kaufman (Eds.), Handbook of Ion Beam Processing Technology, Noyes, NJ, 1989, p. 103.

3. W.F. Calaway, C.E. Young, M.J. Pellin, D.M. Gruen, in: J.J. Cuomo, S.M. Rossnagel, H.R. Kaufman (Eds.), Handbook of Ion Beam Processing Technology, Noyes, NJ, 1989, p. 112.

4. Quantitative sputtering

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