Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
Author:
Affiliation:
1. Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany
2. Felix Bloch Institute of Solid State Physics, Leipzig University, Linnstr. 5, 04103 Leipzig, Germany
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5114973
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