Investigation for Low-Rate Fenceless Al Etching Applied in Fabrication of Superconducting Circuits-Reference-Cited by-同舟云学术

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Investigation for Low-Rate Fenceless Al Etching Applied in Fabrication of Superconducting Circuits

Published:2020-10 Issue:7 Volume:30 Page:1-5
ISSN:1051-8223
Container-title:IEEE Transactions on Applied Superconductivity
language:
Short-container-title:IEEE Trans. Appl. Supercond.

Author:

Xu Wanning^ORCID,Wu Yu,Jin Hua,Ying Liliang^ORCID,Ren Jie^ORCID,Chen Liyun,Shao Yingyi,Li Xiuting^ORCID,Peng Wei^ORCID,Wang Zhen

Funder

Chinese Academy of Sciences

Science and Technology Commission of Shanghai Municipality

National Natural Science Foundation of China

Chinese Academy of Sciences Key Technology Talent Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/77/9086956/09179024.pdf?arnumber=9179024

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