Alumina coatings deposited with reactive DC magnetron sputtering in a CO2/O2 gas mixture
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Comparative characterization of alumina coatings deposited by RF, DC and pulsed reactive magnetron sputtering;Cremer;Surf. Coat. Technol.,1999
2. Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering;Zywitzki;Surf. Coat. Technol.,1996
3. Chemical and structural analysis of aluminum–oxygen coatings obtained by DC magnetron reactive sputtering: some features of the process;Stauder;Surf. Coat. Technol.,1995
4. Voltage-controlled reactive sputtering process for aluminium oxide thin films;Koski;Thin Solid Films,1998
5. Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering;Bartzsch;Surf. Coat. Technol.,2000
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Carbon-doped tin oxide films fabricated by pulse DC magnetron sputtering using CO2 as reactive gas and their application as anodes in lithium-ion batteries;Solid State Ionics;2021-10
2. Effects of the annealing heating rate on sputtered aluminum oxide films;Journal of Wuhan University of Technology-Mater. Sci. Ed.;2017-02
3. EFFECTS OF HEAT TREATMENTS ON ALUMINUM OXIDE COATINGS DEPOSITED ON Ni-BASED ALLOY;Surface Review and Letters;2015-02
4. The mechanical properties of a nanocrystalline Al2O3/a-Al2O3 composite coating measured by nanoindentation and Brillouin spectroscopy;Acta Materialia;2013-04
5. Effects of negative substrate bias voltage on the structure and properties of aluminum oxide films prepared by DC reactive magnetron sputtering;Applied Surface Science;2012-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3