EFFECTS OF HEAT TREATMENTS ON ALUMINUM OXIDE COATINGS DEPOSITED ON Ni-BASED ALLOY

Author:

TANG XIUFENG1,LUO FA1,HSEIH CHUNHAN2,LI XIANGYU2

Affiliation:

1. State Key Laboratory of Solidification Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072, P. R. China

2. Department of Electrical Engineering and Computer Science, Northwestern University Evanston, Illinois 60208, United States

Abstract

Al x O y films coated on both Ni -based superalloy and silica substrates were prepared by DC reactive magnetron sputtering. Post-deposition annealing was carried out on those as-deposited films. And then 1 h heat treatments were done on the annealed films at constant temperatures ranging from 600–900°C to simulate the high-temperature application. The Al x O y film heated at 600°C exhibited good film property. Bonding strength between the 600°C-heated Al x O y film and the Ni -based substrate was about 11.6 MPa.

Publisher

World Scientific Pub Co Pte Lt

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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