Low-friction TiN coatings deposited by PACVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Mechanisms of reactive sputtering of titanium nitride and titanium carbide I: Influence of process parameters on film composition
2. Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure
3. Mechanisms of reactive sputtering of titanium nitride and titanium carbide III: Influence of substrate bias on composition and structure
4. Friction and wear performance of diamond-like carbon films grown in various source gas plasmas
5. Chemical and Structural Effects on the Lubrication Properties of Sputtered MoS2Films
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