Subject
General Physics and Astronomy,General Materials Science
Reference31 articles.
1. Devices and materials for high-performance mobile liquid crystal displays;Lee;J. Mater. Chem.,2012
2. Detection of amorphous-silicon residue generated in thin-film transistor manufacturing process using a high spectral response of amorphous-silicon layer on green light source;Son;Curr. Appl. Phys.,2006
3. Raster area scatter measurements and sample uniformity;Rifkin,1989
4. Optical Scattering: Measurement and Analysis;Stover,1995
5. The use of unpatterned wafer inspection for immersion lithography defectivity studies;Holsteyns,2006
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献