Detection of amorphous-silicon residue generated in thin-film transistor manufacturing process using a high spectral response of amorphous-silicon layer on green light source-Reference-Cited by-同舟云学术

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Detection of amorphous-silicon residue generated in thin-film transistor manufacturing process using a high spectral response of amorphous-silicon layer on green light source

Published:2006-01 Issue:1 Volume:6 Page:84-90
ISSN:1567-1739
Container-title:Current Applied Physics
language:en
Short-container-title:Current Applied Physics

Author:

Son Jeong Seok,Lee Jong Ho,Lee Seung Hee

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Materials Science

Reference9 articles.

1. Quarterly TFT LCD Supply/Demand and Capital Spending Report, Display Search, Q4’03.

2. Liquid-Crystal Displays Addressed by Thin-Film Transistors;Tsukada,1996

3. J.S. Son et al., private communication.

4. Y.M. Liu, Fundamentals of Voltage Imaging Theory, Photon Dynamics Applications Note, 1994.

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