Thermal stabilities of metal bottom electrodes for Ta2O5 metal-oxide-metal capacitor structure
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference18 articles.
1. Tunable barium strontium titanate thin film capacitors for RF and microwave applications
2. Investigation and modeling of the electrical properties of metal–oxide–metal structures formed from chemical vapor deposited Ta2O5 films
3. Electrical characteristics of metal-dielectric-metal and metal-dielectric-semiconductor structures based on electron beam evaporated Y2O3, Ta2O5 and Al2O3 thin film
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