The influence of high-temperature nitridation process on the crystalline quality of semipolar (112‾2) GaN epitaxial films
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference43 articles.
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1. Comparative investigation of semipolar (11–22) GaN grown on patterned (113) Si with different V/III ratios via MOCVD;Semiconductor Science and Technology;2023-02-06
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