A study on the E-H mode transition with the line integrated He 23S metastable atom density in an inductively coupled plasma
Author:
Funder
National Research Foundation of Korea
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference26 articles.
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3. Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching;Pommereau;J. Appl. Phys.,2004
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Role of helium metastable state in the interaction between He atmospheric pressure plasma jet and ns pulsed laser;Spectrochimica Acta Part B: Atomic Spectroscopy;2023-03
2. Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma;Current Applied Physics;2022-04
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