Subject
Mechanics of Materials,General Materials Science,Instrumentation
Reference20 articles.
1. Brown, S.B., Van Arsdell, W., Muhlstein, C.L., 1997. Materials reliability in MEMS devices. in: Transducers ’97––International Conference on Solid State Sensors and Actuators, pp. 591–593
2. Micromechanical fatigue testing;Connally;Experimental Mechanics,1992
3. Mechanical Properties of Microstructures: Experiments and Theory;Dual,1997
4. Characterization and Reliability of CMOS Microstructures;Fedder,1999
5. Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens;Kahn;Proceedings of the Royal Society of London,1999
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