Fabrication and characterization of quasi-three-dimensional capacitor structure based on carbon nanowalls-Reference-Cited by-同舟云学术

Fabrication and characterization of quasi-three-dimensional capacitor structure based on carbon nanowalls

Published:2021-10 Issue: Volume:184 Page:698-705
ISSN:0008-6223
Container-title:Carbon
language:en
Short-container-title:Carbon

Author:

Mumlyakov A.M.,Shibalov M.V.,Timofeeva E.R.,Trofimov I.V.,Porokhov N.V.,Evlashin S.A.,Nekludova P.A.,Pershina E.A.,Anufriev Yu.V.,Tagachenkov A.M.,Zenova E.V.,Tarkhov M.A.

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference45 articles.

1. High-density, low-loss MOS decoupling capacitors integrated in a GSM power amplifier;Roozeboom;MRS Online Proc. Libr.,2003

2. Back-end integrable on-chip MIM decoupling capacitors featuring high capacitance with ultra-low leakage current by nitrogen-incorporated HfZrOx;Chen;IEEE Trans. Nanotechnol.,2019

3. Electrical characterization of metal–insulator–metal capacitors with atomic-layer-deposited HfO2 dielectrics for radio frequency integrated circuit application;Yu-Jian;Chin. Phys. Lett.,2007

4. Interconnect technology trend for microelectronics;Liu;Solid State Electron.,1999

5. Improved nucleation of TiN atomic layer deposition films on SiLK low-k polymer dielectric using an Al2O3 atomic layer deposition adhesion layer;Elam;J. Vac. Sci. Technol. B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,2003

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of Plasma Ions/Radicals on Kinetic Interactions in Nanowall Deposition: A Review;Advanced Engineering Materials;2024-07-10

2. A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area;Carbon;2023-10

3. Carbon Nanowalls as Anode Materials with Improved Performance Using Carbon Nanofibers;Nanomaterials;2023-09-22

4. Izmerenie teploprovodnosti uglerodnykh nanostenok metodom tret'ey garmoniki;Письма в Журнал экспериментальной и теоретической физики;2023-03-15

5. Measurement of the Thermal Conductivity of Carbon Nanowalls by the 3ω Method;JETP Letters;2023-03