CVD diamond growth: Replacing the hot metallic filament with a hot graphite plate

Author:

Lee Kee HanORCID,Seong Won Kyung,Ruoff Rodney S.

Funder

Institute for Basic Science

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference43 articles.

1. Growth of CVD diamond for electronic applications;Plano,1995

2. The deposition of diamond films by filament techniques;Jansen;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,1990

3. Characterization of tantalum impurities in hot-filament diamond layers;Griesser;Diam. Relat. Mater.,1994

4. Growth of diamond particles from methane-hydrogen gas;Matsumoto;J. Mater. Sci.,1982

5. High-rate growth of single-crystalline diamond (100) films by hot-filament chemical vapor deposition with tantalum filaments at 3000 °C;Tabakoya;Phys. Status Solidi,2019

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