Thin films on silicon-Reference-Cited by-同舟云学术

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Thin films on silicon

Published:2020 Issue: Volume: Page:133-213
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Container-title:Handbook of Silicon Based MEMS Materials and Technologies
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Elsevier

Reference504 articles.

1. Silicon Processing for the VLSI ERA;Wolf,2000

2. General relationship for the thermal oxidation of silicon;Deal;J. Appl. Phys.,1965

3. Semiconductor devices;Sze,1985

4. Semiconductor Silicon;Irene,1977

5. Redistribution of acceptor and donor impurities during thermal oxidation of silicon;Grove;J. Appl. Phys.,1964

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