A Conceptual Framework for “Industry 3.5” to Empower Intelligent Manufacturing and Case Studies
Author:
Publisher
Elsevier BV
Subject
Artificial Intelligence,Industrial and Manufacturing Engineering
Reference9 articles.
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2. C.-F. Chien, Y.J. Chen, and J. T. Peng. Manufacturing intelligence for semiconductor demand forecast based on technology diffusion and product life cycle. IJPE 128 (2)(2010) 496-509.
3. C.-F. Chien, S.C. Chuang. A framework for root cause detection of sub-batch processing system for semiconductor manufacturing big data analytics, IEEE Trans. Semiconductor Manufacturing 27 (4)(2014) 475-488.
4. C.-F. Chien, Y.J. Chen, C.Y. Hsu, H.K. Wang. Overlay error compensation using advanced process control with dynamically adjusted proportional-integral R2R controller. IEEE Trans. Automation Science and Engineering 11 (2)(2014) 473-484.
5. C.-F. Chien, Y.J. Chen, and C. Y. Hsu. A novel approach to hedge and compensate the critical dimension variation of the developed-andetched circuit patterns for yield enhancement in semiconductor manufacturing. Computers & Operations Research 53(2015) 309-318.
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