Author:
Deng Jia,Dong Jingyan,Cohen Paul
Subject
Artificial Intelligence,Industrial and Manufacturing Engineering
Reference34 articles.
1. Review of laser nanomachining;Ali;Journal of Laser Applications,2008
2. Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon;Berenschot;Journal of Micromechanics and Microengineering,2013
3. 3D-nanomachining using corner lithography;Berenschot;In Proceeding of 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems,2008
4. Proximity effect in electron-beam lithography;Chang;Journal of Vacuum Science & Technology,1975
5. Effects of AFM-based nanomachining process on aluminum surface;Fang;Journal of Physics and chemistry of Solids,2003
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献