Crafting at the nanoscale: A comprehensive review of mechanical Atomic force microscopy-based lithography methods and their evolution
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Published:2024-07
Issue:
Volume:243
Page:113036
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ISSN:0264-1275
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Container-title:Materials & Design
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language:en
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Short-container-title:Materials & Design
Author:
Vincenti LorenzoORCID,
Pellegrino PaoloORCID,
Cascione Mariafrancesca,
De Matteis Valeria,
Farella IsabellaORCID,
Quaranta Fabio,
Rinaldi Rosaria
Funder
European Commission