Fundamental study of TiN films deposited by ion beam mixing
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference8 articles.
1. Adherent TiN films produced by ion beam enhanced deposition at room temperature
2. Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical load
3. Preparation of TiN thin film by dynamic mixing method. N2+ (1keV) irradiation effects.
4. Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method
5. Y. Ando, K. Ogata, H. Yamaki and S. Sasaki, Nucl. Instrum. Methods, to be published.
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