Ions Bombardment in Thin Films and Surface Processing
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Published:2003-06
Issue:3
Volume:5
Page:1841-1847
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ISSN:1009-0630
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Container-title:Plasma Science and Technology
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language:
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Short-container-title:Plasma Sci. Tech.
Author:
Shuhua Xu,Zhaoxing Ren
Subject
Condensed Matter Physics
Cited by
3 articles.
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