Preparation of TiN thin film by dynamic mixing method. N2+ (1keV) irradiation effects.
Author:
TAKANO Ichiro,ISOBE Shoji,SASAKI Teikichi A.,BABA Yuji
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics
Cited by
1 articles.
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