Organo-metallic chemical vapour deposition of silicon-rich amorphous SixC1−x refractory layers using SiEt4 as a single source
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Compositional and structural properties of amorphous SixC1−x : H alloys prepared by reactive sputtering
2. Reactive plasma deposited SixCyHz films
3. SiC coatings for first-wall candidate materials by R.F. sputtering
4. The growth of hetero-epitaxial SiC films by pyrolysis of various alkyl-silicon compounds
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich Si x C 1-x thin films deposited by R.F co-sputtering;Vibrational Spectroscopy;2017-03
2. Infrared and Raman Study of Amorphous Silicon Carbide Thin Films Deposited by Radiofrequency Cosputtering;Spectroscopy Letters;2014-03-05
3. SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors;Surface and Coatings Technology;2013-01
4. Toward the Improvement of the Microstructure of Chemical Vapor Deposited Aluminum on Silicon Carbide;Journal of The Electrochemical Society;2001
5. Al2O3 coatings on stainless steel from Al metal-organic chemical vapor deposition and thermal treatments;Surface and Coatings Technology;2000-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3