High speed pipe inner coating using magnetron hollow-cathode discharge in a magnetic field
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference8 articles.
1. Reactive plasma deposited SixCyHz films
2. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
3. Low Pressure Sputtering System of the Magnetron Type
4. Profile control of SiH radicals by cross magnetic field in plasma processing
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1. Inner coating of long-narrow tube by plasma sputtering;Surface and Coatings Technology;2000-09
2. Ionized hollow cathode magnetron sputtering;Ionized physical vapor deposition;2000
3. Extended Anode Effect in Coaxial Magnetron Pulsed Plasmas for Coating the Inside Surface of Narrow Tubes;Japanese Journal of Applied Physics;1999-07-30
4. Titanium coating of the inner of a 1m long narrow tube by double-ended anode coaxial magnetron-pulsed plasmas;Surface and Coatings Technology;1999-02
5. Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma;Surface and Coatings Technology;1998-01
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